عنوان مقاله [English]
نویسندگان [English]چکیده [English]
Titanium thin film of 70 nm thickness produced by e-beam method and post annealed at different annealing temperature (300-573 K) with constant flow of oxygen. Crystallography orientation of samples investigated by X-ray diffraction method, while a spectrophotometer instrument was employed for optical properties study. The result showed anatas phase of titanium dioxide formation with annealing process, while grain size and optical band gap increased with annealing temperature, and influence of these parameters investigated on photo catalysis of samples.